TEM Products
TEM-800 Series
Gas Filters
- 99.9999999% Efficient @ 0.003 Microns
- PTFE Membrane
- 0.5 square foot Effective Filtration Area
- 316L, 10Ra finish, electro polished stainless steel housing
- 750 psig operation pressure at 250 F
- Helium leak tested to 1 X 10 -9 cc/sec
- Available with Compression, Face Seal, and N.P.T. fittings
- Interchangeable with all Pall and Millipore Filters
- Compatible with all Semiconductor Grade Gases
TEM-800 Series filters are specifically designed for filtration of critical semiconductor gases where flow rates of more than 20 liters per minute are required. The filters use a PTFE membrane in a small pleated cartridge form to provide .003 micron absolute filtration. The teflon membrane cartridge is encapsulated in a 316L stainless steel housing that is electroplished and totally welded. The final assembly is purged at a high flow rate with filtered nitrogen for initial cleanliness.
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