TEM Products

TEM-400 Series
Gas Filters
- 99.9999999% Efficient @ 0.003 Microns
- 2.0 sq. ft of PTFE Membrane
- 316L, 10 RA Electro-polished Stainless Steel Housing
- 250 psig Operation Pressure rated at 250F
- Helium Leak Tested to 1 X 10 -9 cc/sec
- Compatible with all Semiconductor Grade Gases
- Available with NPT, Compression, Face Seal, and Butt Weld Tube
TEM-400 Series filters are specifically designed for filtration of semiconductor gases when flow rates to 75 SCFM are required. This all-welded assemply will deliver 0.003 micron absolute filtration where a high flow rate is required and space is small.
This PTFE membrane cartridge is enclosed in a 316L stainless steel electro-polished welded housing. Final assembly is purged with filtrated nitrogen for initial cleanliness.

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