TEM Products

TEM-100 Series
Gas Filters
- 99.9999999% Efficient @ 0.003 Microns
- 16.5 ft2 of PTFE Membrane
- Polypropylene core, cage and end caps with Viton O-ring
- 316L 10 RA Electropolished Stainless Steel Housing
- 250 psig Operation Pressure rated at 250F
- 100% Integrity Tested
- Helium Leak Tested to 1 X 10 -9 cc/sec
- Compatible with Semi-Grade Gases
- Available with Compression, Gasket Seal, and Butt Weld Fittings
TEM-100 Series filters are specifically designed for filtration of semiconductor gases when flow rates to 7300 SCFM are required. This all-welded assemply will deliver 0.003 micron absolute filtration where a high flow rate is required and space is limited. Available with 1" and 1.5" connections.
This PTFE Membrane and Polypro Supports Cartridge is enclosed in a 316L stainless steel electro-polished welded housing. Final assembly is purged with filtrated nitrogen for initial cleanliness. It is also suited for high temperature applications to 200F/97C. Preconditioning is optional.

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